diff --git a/generator/templates/api_cpp.h b/generator/templates/api_cpp.h
index c3b21fb..6ef3316 100644
--- a/generator/templates/api_cpp.h
+++ b/generator/templates/api_cpp.h
@@ -27,6 +27,12 @@
 
 namespace {{metadata.namespace}} {
 
+    namespace detail {
+        constexpr size_t ConstexprMax(size_t a, size_t b) {
+            return a > b ? a : b;
+        }
+    }  // namespace detail
+
     {% set c_prefix = metadata.c_prefix %}
     {% for constant in by_category["constant"] %}
         {% set type = as_cppType(constant.type.name) %}
@@ -232,8 +238,10 @@
             {% for member in type.members %}
                 {% set member_declaration = as_annotated_cppType(member) + render_cpp_default_value(member) %}
                 {% if type.chained and loop.first %}
-                    //* Align the first member to ChainedStruct to match the C struct layout.
-                    alignas(ChainedStruct{{Out}}) {{member_declaration}};
+                    //* Align the first member after ChainedStruct to match the C struct layout.
+                    //* It has to be aligned both to its natural and ChainedStruct's alignment.
+                    static constexpr size_t kFirstMemberAlignment = detail::ConstexprMax(alignof(ChainedStruct{{out}}), alignof({{decorate("", as_cppType(member.type.name), member)}}));
+                    alignas(kFirstMemberAlignment) {{member_declaration}};
                 {% else %}
                     {{member_declaration}};
                 {% endif %}
diff --git a/generator/templates/dawn/native/api_structs.h b/generator/templates/dawn/native/api_structs.h
index d655344..232d286 100644
--- a/generator/templates/dawn/native/api_structs.h
+++ b/generator/templates/dawn/native/api_structs.h
@@ -64,8 +64,9 @@
             {% for member in type.members %}
                 {% set member_declaration = as_annotated_frontendType(member) + render_cpp_default_value(member) %}
                 {% if type.chained and loop.first %}
-                    //* Align the first member to ChainedStruct to match the C struct layout.
-                    alignas(ChainedStruct) {{member_declaration}};
+                    //* Align the first member after ChainedStruct to match the C struct layout.
+                    //* It has to be aligned both to its natural and ChainedStruct's alignment.
+                    alignas({{namespace}}::{{as_cppType(type.name)}}::kFirstMemberAlignment) {{member_declaration}};
                 {% else %}
                     {{member_declaration}};
                 {% endif %}